Know All About Diffusion Pump Part-2
Q.11 How to prevent back streaming of diffusion pump oil? Ans. To prevent back streaming of Diffusion Pump oil it must be ensured that- System is “Roughed out” before Diffusion Pump is put in line. Rotary vacuum pump is maintaining a vacuum of at least 10-2 Torr. If process is causing release of a large…
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